ABBPSTX720-600-70

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功能码：主机发送的功能码告诉从机执行什么任务。表1-1列出的功能码都有具体的含义及操作。

数据区：数据区包含需要从机执行什么动作或由从机采集的返送信息。这些信息可以是数值、参考地址等等。例如，功能码告诉从机读取寄存器的值，则数据区必需包含要读取寄存器的起始地址及读取长度。对于不同的从机，地址和数据信息都不相同。

错误校验码：主机或从机可用校验码进行判别接收信息是否出错。有时，由于电子噪声或其它一些干扰，信息在传输过程中会发生细微的变化，错误校验码了主机或从机对在传送过程中出错的信息不起作用。这样增加了系统的安全和效率。错误校验采用CRC-16校验方法。

注：信息帧的格式都基本相同：地址码、功能码、数据区和错误校验码。
LAM Research 810-077389-002 MCE I/O

AVIZA TECHNOLOGY 165990-001

AXCELIS 238401 PWB-M200

VARIAN E15000020 PCB, MULTI-EMI

VARIAN SEMICONDUCTOR EQUIPMENT E15000150

VARIAN SEMICONDUCTOR EQUIPMENT E15000310

NIKON KBB04410-AE14

HP 311143-001 ProLiant DL380 G4; 4GB RAM, CPU: TWO Intel Xeon 3400DP/1M/800; SIX

HP 311143-001 ProLiant DL380 G4; 3GB RAM, CPU: TWO Intel Xeon 3400DP/1M/800; FOU

STEC SEC-4400MC-UC Mass Flow Controller,STEC?4400, 300CCM, SF6, 100CCM

Rite-Track 99-49013-01

HITACHI KOKUSAI 5UOT041528 MFC CONTROLLER- CX1307

SVG 254901-004 A

AMAT 0200-09089 100MM SPUTTER12NC:790?050202513

HORIBASTEC HoribaSTEC 3462578558, MFC, VALVE C, TREAT UC, GAS CHF3,FLOW RATE 50

HORIBASTEC SEC-7330M-C-UC-?HBR-200CCM-NO SEC 7330M, MFC, GAS HBR,FLOW RATE 200CCM

HORIBASTEC SEC-4400M-C-SUC?-SIH2CL2-200CCM?-NO MFC,VALVE C, TREAT SUC, GAS SIH2CL2

MDC GV-1500M-P GV-1500M-P

YASKAWA SGMAH-A3B1AG761AC

AMAT 0200-10018 SGD,INNER,6 EAR,1'50"

AMAT 0020-99122

AMAT 0090-A0700

AMAT 0224-02128 DOOR,13"

Teradyne BD-2000-006-05

AMAT 0720-03770

AMAT 0020-29687

AMAT 0010-91386

AMAT 0030-90150

AMAT 0150-13119 Cable Assembly, PT1-PT2

AMAT 0150-13120 Cable Assembly, PT2-PT3

NIKON PRECISION A01 OF UP/DOWN ARM TY 4B990-033 04068, 4B990-033AN

AMAT 02-81900-00

AMAT 0021-26506 Diameter 190P, Slem Cell, SC E

AMAT 0150-92045 CFA 8AP6/9FP1

TEL 3M87-039449-11

HarmonicDrive 1000058 MOTOR,X,W/DIF

HarmonicDrive 1000059 MOTOR,P,W/DIF

LAM 856-380234-118 9400, EDGE RING KIT, CERAMIC TO QTZ, 8"

Swagelok KF50

SVG 99-38892-01

AMAT 0050-00662

HEWLETT PACKARD HP44472A

SEMI GAS SYSTEMS GSM-4A

AMAT 3670-01022 .10X1.125X2.25(?SPARE FOR 0190-77171)

NOVELLUS 15-167054-01 STATION 2-5,GAM

AMAT 0240-40031

ARROW 911043-003 D 1/2 FLARE AR-200











AMAT 0020-06534

AMAT 0040-03025

FLANDERS FILTERS 0-008-2-19-06-S?U-52-00-19P31P

ASM 02-81226

ASM 02-81227

TEL CT1380-101437-1?1 BOARD CN-BASE2

AMAT 0010-00834

AMAT 0850-00065

AMAT 0010-00833

AMAT 0020-96817

AMAT 0020-24140

Teradyne 953-054-00

AMAT 0020-40827

AMAT 0050-54496

AMAT 0050-00881

LEICA ML-569163 NPL 20x/0.35 DF. P/N ML 569163

AMAT 0040-50564

Applied Materials 0010-00836

AMAT 0190-11782 SPEC., TRACK (XU-ACL4202)

AMAT 0190-11783 SPEC., TRACK (XU-ACL4203)

SVG 99-80295-01

EATON 1522230

WATLOW P0168 TREBOR P0168

MWB Z-68-887 TRANSFORMER CURRENT S-N 85-833432 MWB

AMAT 1200-01457 Relay VAC 8KV 26.5VDC COIL

AMAT 0190-A1510 CONT. ASSY

GSI 2870109-1

AMAT 0140-78000 CA

SVG 169580-001 PCB 5V LOOP SIGNAL T/C; SVG

AKRION INC 1901581C-00

Teradyne 259970-001

Teradyne 950-732-01

AMAT 3800-01237 RGLTR PRESS 0-60PSIG 1/4"

AMAT 5 (C20)

AMAT 1060-00003 CONV RS232/ Fiber Optic VERSALINK, RS-232-C

AMAT 0050-07925

AMAT 0100-09170

AMAT 4200423

AMAT 600727

AMAT 7

AMAT 0040-80344

AMAT 0227-05487

Trane MOD-0361 Module-Purge MOD-0361

ELDER COMMUNICATIONS TECHNOLOGIES Y-LS-Y 100 FT CABLE 34 WIRE

Sosul S-?EM-N

AMAT 0010-A0255

EDWARDS A52850000

Applied Materials 0020-40192











AMAT 3400-00380

AMAT 3400-00381

Varian P1412009

AMAT 0021-39059

TERADYNE 950-975-00

AMAT 3870-02428 VERIFLO 45300297 945AOPLPNCS5160 VALVE PNEU DIAPH 1/4-F/BW/F 125

Teradyne 405-274-00 POWER SUPPLY, RPM5DRDRDAS422, POWER ONE, INPUT 50-60HZ, 230V

Teradyne 405-276-00 POWER SUPPLY, RPM5C1C1A1D1KS4?24, POWER ONE,INPUT 50-60HZ,230

Teradyne 873-139-00 EBM FI-600-1.0-001, DUAL R3G310-AF09-06 FAN, (2x) 48V-(42-52

AMAT 0020-78782

TERADYNE 950-566-03A PCB, J996

DNS 7-39-06704

AMAT 0227-44090 IND XDCR 3.5DIG 7-SEG-LCD 0250PSI

AMAT 7 "CK FCO695

AMAT 0140-11365

AMAT 0050-25976

LINDE AG MPVL80 Kit for Pressure Control MPVL80 COMP. E340

AMAT 0040-61340 ENCLOSURE,PWR MODULE,END PT,200/300 PROD

AMAT 0140-00715 Harness, Rack 1(A) HTR DRVR AC with ISO XFMR,

MATTSON TECHNOLOGY INC A40-00241

KLA-TENCOR CORP X48177

BTS BARUCH 3777 PFD3

Tokyo Electronic Industry 2-824310-B LCD

AMAT 0020-24987

AMAT 0020-29478

AMAT 0020-49300

AMAT 0020-54075

AMAT 0020-83428

AMAT 0020-98952

AMAT 0021-20604

AMAT 0021-37650

AMAT 0040-80712

AMAT 0090-35121

AMAT 0100-09175

AMAT 0100-35148

AMAT 0100-90962

HAMAMATSU 0108247-000 MERCURY-XENON LAMP 24.12V/1.76W L2917-04

TEL 012-007099-1 Vacuum Valve, Pressure: 10-6 Pa~atm,

TOKYO ELECTRON 015-012192-1 MFC, 02 20SLM

AMAT 0150-09726 CABLE,25' ANALOG 2 GAS

AMAT 0150-10668 24V AUX,GIGA-FILL SAC

AMAT 0190-18067

AMAT 0190-22570 Reader ASC-I1

AMAT 0190-35212

AMAT 0190-A7951 VALVE Hi-Vac.Ang V1v NW25 V5 VAT

ASM 02-322475D08 ASM 16-322479D08 8"

AMAT 0200-00457

AMAT 0200-09553












AMAT 0200-40131V

AMAT 0227-46709 Cable, 100 Ft. RF

NOVELLUS 04-730876-02

VERTE-8

AMAT 1080-00132 SIGMA MINI 20W 24VDC DIGI

VALQUA 10K-25-PFA-SCS1?3 VALVE, MANUAL 10K 20 PFA SCS13

TEL 1110-320713-12 CENTER SUS304CP

AMAT 1140-00132 POWER SUPPLY LINEAR 100/120/220/240?VAC INP +

MKS 1179A13CR1CV-S MFC, Range: 1 SLM, Gas: O2

AMAT 1270-01915 PRESSURE SWITCH, 1-10BAR NO

Motion Control Group (MCG) 1472-ME8043-30 GENEVA ASSY (W/MOTOR),77822?-033

NOVELLUS SYSTEMS 15-033113-00

NOVELLUS 15-183664-00

NOVA 1500630-S

EATON 1519670E

EATON 1520110

EATON 17123010

Schumacher 16 Display Control Board W/ CONTROL PANEL, 1495 3175A

TEL 1D10-200921-12 DEPO, SEALD P1

TEL 1D10-200922-12 DEPO, SEALD P2

DNS 2-39-47761 CKD AMSZ2-X4US CKD AMSZ2-X4US

Proteus 200021 Connector, 1/4T X 1/8P, F

Ontrak 22-0075-009 DA

LAM Research 26-8800-111

STRASBAUGH 284439

KIDDE-FENWAL 295-105

TEL 2980-190199-11 NSK JS1003FN502

HITACHI KOKUSAI 2BEX4-52511-1 VALVE, AIR-OPERATE, 4VALVE-6WAY

HITACHI KOKUSAI 2BEX4-52511-C VALVE, AIR-OPERATE, 4valve-6way

HITACHI 3-846513-*A CYLINDER SMC CDQ2B140C-P0064?-XC11; 3-846513-A

AMAT 3800-01102 43800906, Pressure Regulator; Air-0-100PSI 2 Port 1/4"

AMAT 3870-04851 VALVE.VAC

TEL 3S80-000485-11 LAMP 406MM V2.2 542-20995-01

AMAT 4060-00068 MANF ASSY PNEU 8 STATION VQ1000

WJ 4082282E KIT DMPR ASSY. SCAV.

GLOBE MOTORS 409A751 GEARMOTOR DC IM-15

KOKUSAI 4ROD280559

METRON 50079 SHIELD FOR CERAMIC RING 5"

JAZZ 506386 Spool piece for N2 process flow pump; 280563

SEMITOOL 620T0072-01 END EFFECTORS 2 ALUMINUM

Pioneer Magnetics 2972A-2-3 Power Supply, Input: 230V~ 50/60Hz, 4.8A, Output: 50

Pioneer Magnetics PM 2974A-3-5 , Input: 120/240V~. 50/60 Hz, 10.7A,

LAM 716-026652-002 RING, FOCUS

TOMOE VALVE 732X-3R-50A FLANGE: JIS 10K, DISC SEA

NOVELLUS 73797-04

LAM RESEARCH 839-029227-102

LAM 859-4541-002 USHIO UXM-4000P

Proteus Industries 9100SS24P19












AMAT 9150-04138

ASAHI AV7132

BROOKS INSTRUMENT BM23100L03

CAT CEPOTR-8011031

USHIO COM5A0003 SMS

OMRON CS1W-BC083

OMRON CV500-BC101

OMRON CV500-BI112

GF 027/DA 63DN50,

KITAMURA E3-125-D1393-TN VALVE; SIZE: 40A, W.P.: 2 KGF/CM2, SUP.P.: 4 KGF/CM2

KTM E4-90-D3300-94T?N VALVE DIAPHRAGM AIR actuator E4-90-D3300-94T?N

KITAMURA E4-90-D3394-TN 20A VALVE DIAPHRAGM AIR actuator, E4-90-D3300-TN 20A; VA

ULVAC EM2338-160-02A

ENGINEERED PARTS & SUPPLY, LLC BM16171 PCB, BM16171

FUJIKIN FBSDW-6.35-4B6-?BGC VALVE 316 SSFBSDW-6.35-4B?6-BGC; 4-WAY

AERA FC-785C MASS FLOW CONTROLLER, GAS O2, RANGE 1.5SLM

ADVANCED ENERGY FC-D986CYBF-7 MFC,MULTI-GAS 5-10 SLM

ADVANCED ENERGY FC-D986CYBF-7.5 MASS FLOW CONTROLLER MULTI-GAS 10-20 SLM

INTEGRATED CIRCUIT SUPPORT INC ICS-2468120-NOS?HADOW LAM 4500 Clamp 4DEG

HAMAMATSU L9519-01

HAMAMATSU L9519-02 L9519-02

IKO LWL-15-C2-R787-?E548

KITAMURA M4-90L-D100-81K VALVE; SIZE: 25A, W.P.: 0.4MPa, SUP.P.: 0.4MPa, VALVE N

KITAMURA M490L-D100-81TN VALVE; SIZE: 15A, W.P.: 0.3MPa, SUP.P.: 0.4MPa, MFG NO:

ULVAC JAPAN LTD ME04-9616-0

PANASONIC MSDO21AXX04

Texas Instruments MSP50C614

MERLIN GERIN NS100-160-250 CIRCUIT BREAKER 3 ph N/H/NA 250A

PHILPPINES 6100267 OP-07EZ 8

KTM P4-50-D600 VALVE Teflon, AIR OPERATE, P4-50-D600,P4-5?0-D600-PTFE 15A

KITAMURA P4-75-D600-25A-?01 AIR OPERATED VALVE Teflon; D-172360; TYPE: P4-75-600

KTM P4-75-D600-PTFE VALVE, AIR OPERATE; TAG NO. S; MFG NO. D-132614; SIZE. 25A;

PFC PC-T578 Ring,

NAIGAI PF2-10SVABS

SONDERMANN RM-PP-12-150-30?S 2 M

SMC SRH3000-02 REGULATOR 316 SS

NIHON DIGITAL DENSHI 853-S040471-001 POWER SUPPLY; 853-S040471-001

FURON UPRM-144-30-M REGULATOR; UPRM 1/4 1/4F, 30-PSI M

INTEGRATION ACCESSORIES WJ-967285-001 BOARD-I/0-MOTHE?R-W

WJ WJ-968121-000 BOARD-CPU, EXPAND- CCA

SMC XLD-40-X853 V

MKS 122BA-00010EB Type: 122B, Range: 10 Torr, Input: +/-15 V

Generic 138740-37 PCB

Nikon 14036-1D PCB - PEM PSD

mks 152E-P0 Controller, Exhaust Valve

LEYBOLD INFICON CR091D 1000-TORR

Generic 1A10047A0 PCB I/O

AMAT 21016400052